Layered Annealing Crystallization Furnace

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Adopts self-developed heating system and temperature control method to improve thermal uniformity during perovskite crystallization, ensuring consistency in rapid annealing and crystallization of perovskite materials.

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Perovskite, layered annealing, crystallization, independent temperature control, rapid cooling, ultra-clean environment, industrial computer, touch screen

Product Feature

Designed for post-film annealing and crystallization processes, it consists of conveying sections, robotic arm loading/unloading devices, furnace body, pre-heating zone, high-temperature zone, cooling zone, wafer handling unit, gas inlet/outlet system, transmission components and electrical control system. Each layer allows independent adjustment of heating and cooling times.

The interior cleanliness of the furnace reaches Class 100. It uses modular robotic arms for X-Y-Z handling, with conveying rollers made of UPE anti-static material to prevent bottom surface scratches.

Equipped with intelligent control software, high temperature control accuracy, fast and precise movements, controllable heating rates, uniform substrate surface temperature and complete solvent volatilization.

Product Details

Series	Product Size	Loading Direction	Max Temp	Takt Time	Heating Zone	Atmosphere
HXL	300×300mm-2400×1600mm	Long edge loading	200℃	≥30s/PCS	Pre-heating/heating/cooling zones	Air/Vacuum

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