Designed for debinding-firing processes of ceramic materials such as electrostatic chucks, HTCC substrates, package housings and SMD components under N₂+H₂ (dry/wet) atmospheres, as well as new product process experiments.
1. Atmosphere, temperature and dew point are controllable with dry/wet gas path switching, composed of a gas control rack, humidification chamber and insulated gas inlet pipes. The exhaust port is equipped with a resin/oil recovery device and exhaust gas treatment unit.
2. Each gas inlet line adopts a "one active, one standby" configuration to effectively ensure continuous atmosphere supply.
3. The humidification chamber is divided into pre-firing, main-firing and pre-moistening units. An imported dew point meter enables precise control of each inlet's dew point with an accuracy of ±1℃.
4. The chamber uses herringbone-patterned dense corundum-mullite material. Molybdenum wires are suspended around the chamber for precise temperature control.
| Series | Chamber Volume | Max Temp | Oxygen Content | Pessure Measurement | Heating Element | Atmosphere |
| HXL | 250L | 1700℃ | 10ppm | Oven pressure feedback | Molybdenum wire | H2+N2 (Adjustable ratio of dry & wet gas mixture) |
